Browsing International Journal of Nanoelectronics and Materials (IJNeaM) by Subject "MEMS"

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    • Design and fabrication of uniform aluminium pores for planar microfiltration system 

      Kamarul ‘Asyikin, Mustafa; Jumril, Yunas; Azrul Azlan, Hamzah; Burhanuddin, Yeop Majlis (Universiti Malaysia Perlis (UniMAP), 2020-12)
      This paper presents a design and fabrication of a fluid filtration system for separating biological molecules through uniform pores in silicon-based planar microfiltration system. The study is aimed to find a simple ...

    • A review: Properties of silicon carbide materials in MEMS application 

      Noraini, Marsi; Burhanuddin, Yeop Majlis; Faisal Mohd, Yasin; Hafzaliza Erny, Zainal Abidin; Azrul Azlan, Hamzah (Universiti Malaysia Perlis (UniMAP), 2020-12)
      The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices ...