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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software114

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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software20218740

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Abstract, Acknowledgment.pdf3
Literature review.pdf3
References and appendix.pdf2
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Introduction.pdf1
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Results and discussion.pdf1

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