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Effect of alignment mark depth on alignment signal behavior in advanced lithography
(Universiti Malaysia Perlis, 2008)
Finding a robust alignment strategy is one of the key evaluations in defining
photolithography process. Alignment is a process to determine how the current pattern is
placed on the wafer. Alignment is done by an optical ...
Nanotechnology development in Malaysia: current status and implementation strategy
(Universiti Malaysia Perlis, 2008)
Nanotechnology development offers the promise of advances within and connections across many disciplines-biology, chemistry, physics, materials science and engineering.
Determination of the critical success factors in ...