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Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire
(Institute of Electrical and Electronics Engineers (IEEE), 2012)
In fabrication of Nanowire alignment and exposure are the most critical steps in photolithography process, the resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original ...
Selection of optimal parameters in fabrication of poly (dimethylsiloxane) microfluidics using taguchi method
(American Scientific Publishers, 2013-01)
The excellent performance and achievements by the microfluidics systems at fluid flow manipulation in the recent years have ignited the passion and interest of many researchers around the world, Since a microfluidic is ...
Novel in-house fabrication of nano lab-on-chip devices
(Bentham Science Publishers, 2013)
20nm SiNWs transducers have been fabricated by means of simple in-house fabrication method. A low cost, simple top-down approach has been successfully used for the fabrication of very sensitive SiNWs. The fabrication was ...
Fabrication of nanowire using ash trimming technique
(Trans Tech Publications, 2013)
The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw/Δh, the study also revealed that the proposed fabrication method could potentially be used ...