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Nanoelectrode chrome photomask design and specification for biosensor fabrication
(Trans Tech Publications, 2013)
This paper explains the most crucial part of any microchip fabrication, which is the mask design for photolithography process. The design is initially sketched roughly to meet the design specification and later on designed ...
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
(Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)
In teaching undergraduates program in
MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low ...