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Now showing items 51-52 of 52
Design and fabrication of silicon nanowire based sensor
(Electrochemical Science Group (ESG), 2013)
This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a ...
Designing microchannels separator mask for lithography process
(Trans Tech Publications, 2013)
Recently microfluidic has drawn attention from fellow research because of their unique properties and behavior in biotechnology, biomedical, micro and nanotechnology. Microfluidic is a combination from several components ...