Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Lateral nanogap"
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Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction (American Institute of Physics., 2012)This study describes the comparison among the three fabrication methods of an array of poly-silicon nanogap structures. The three different methods are size expansion technique (SET), size reduction technique (SRT) and ...