Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Inductively coupled plasma-reactive ion etching"
Now showing items 1-1 of 1
Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method (Trans Tech Publications, 2014)A simple method for the fabrication of silicon nanowires using Electron Beam Lithography (EBL) combined with thermal oxidation size reduction method is presented. EBL is used to define the initial silicon nanowires of ...