Browsing Uda Hashim, Prof. Ts. Dr. by Subject "ICAMN 2007"
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Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography (American Institute of Physics, 2010-03-11)A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. ...