Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Beam energy"
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PMMA characterization and optimization for Nano Structure formation (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)The limitations imposed on optical lithography by the wavelength of light have been overcome using electron lithography. Electron lithography offers high resolution because of the small wavelength of the 10-50 keV electrons ...