Browsing Uda Hashim, Prof. Ts. Dr. by Author "uda@kukum.edu.my"

Now showing items 1-3 of 3

    • A cost effective and consummate fabrication teaching set up for microelectronic engineering undergraduate 

      Uda, Hashim, Prof. Dr.; Zul Azhar, Zahid Jamal, Prof. Dr.; Mohammad Nuzaihan, Md Nor (Malaysian Invention & Design Society (MINDS), 2005-05-19)
      The package, which is fully designed and developed using KUKUM in-house expertise, is the first teaching laboratory that is purposely built for undergraduate microelectronic program in Malaysia.

    • Effect of alignment mark depth on alignment signal behavior in advanced lithography 

      Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab (Universiti Malaysia Perlis, 2008)
      Finding a robust alignment strategy is one of the key evaluations in defining photolithography process. Alignment is a process to determine how the current pattern is placed on the wafer. Alignment is done by an optical ...

    • MOS Transistor Mask Design Using SEM Based E-Beam Lithography 

      Uda, Hashim, Prof. Dr.; Nur Hamidah, Abdul Halim; Mohammad Nuzaihan, Md Nor; Zul Azhar, Zahid Jamal, Prof. Dr. (Malaysian Invention & Design Society (MINDS), 2006-05-19)
      Electron beam lithography (EBL) is one of the alternative tools in transferring micro and nano circuit patterns from design editor to the substrate. EBL is state-of-the-art technology for micro and even to nano feature ...