Browsing Uda Hashim, Prof. Ts. Dr. by Author "Nazwa, T."
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Fabrication of amorphous silicon microgap structure for energy saving devices
Dhahi, T.H.S.; Uda, Hashim, Prof. Dr.; Md. Eaqub, Ali; Nazwa, T. (Sains Malaysiana., 2012-06)We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ...