Browsing Uda Hashim, Prof. Ts. Dr. by Author "Hashim, Saim"
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Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
Mohd Zainizan, Sahdan; Uda, Hashim; Hashim, Saim; Marlia, Morsin (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)In teaching undergraduates program in MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low ... -
Development of In-House MOS transistor at KUKUM Micro Fabrication Cleanroom: Microelectronic undergraduate activities
Marlia, Morsin; Nur Hamidah, Abdul Halim; Uda, Hashim; Hashim, Saim (Kolej Universiti Kejuruteraan Utara Malaysia, 2005-05-18)This paper presents the module development of inhouse MOS transistor device at KUKUM Micro Fabrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four ...