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Synthesis and characterization of self-assembled, high aspect ratio nm-scale columnar silicon structures
(Institute of Electrical and Electronics Engineers Inc., 2013-06)
The aim of this work is to synthesize nm-scale columnar structures in Si principally for solar cell applications. These structures are also desirable as templates for heteroepitaxial growth of SixGe1-x. A nanostructured ...
Response surface methodology (RSM) in fabrication of nanostructured silicon
(Trans Tech Publications Ltd, 2016)
In this paper, a respond surface methodology (RSM) model has been developed using three levels Box-Benkhen experimental design (BBD) technique to study the influence of several metal-assisted chemical etching (MACE) process ...