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Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
(Universiti Malaysia Perlis, 2007)
Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and ...
Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study
(Universiti Malaysia Perlis (UniMAP), 2007)
The aim of this research is to fabricate and characterize (optical and electrical) an ultra thin silicon dioxide for sub nano devices. In this research, dry oxidation method using high temperature furnace
is chosen to ...
Characterization of alignment mark to obtain reliable alignment performance in advanced lithography
(Universiti Malaysia Perlis (UniMAP), 2007)
The continued downscaling of semiconductor fabrication has imposed increasingly tighter
overlay tolerances. Such tight tolerances will require very high performance in alignment. Hence, the objective of this research to ...