Browsing School of Microelectronic Engineering (Theses) by Subject "Surface metrology"
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Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2013)Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer ...