Browsing School of Microelectronic Engineering (Theses) by Subject "Source target"
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Preparation and characterization of bulk nanoporous Sn, SnO2 AND Zn
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2013)Extreme ultraviolet lithography (EUVL) has garnered much attention due to its potential in high-volume manufacturing (HVM) of integrated circuit (IC). This research contributes to the study of EUV source target. It has ...