Browsing School of Microelectronic Engineering (Theses) by Subject "Sol-gel technique"
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Sol-gel BST thin films for FeFET applications : fabrication and characterization
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2012)The effect of the chemical composition and film thickness of the ferroelectric barium strontium titanate (BST) at the memory window behavior of Al/BST/SiO2/Si-Gatefield effect transistor structure has been investigated. ...