Browsing School of Microelectronic Engineering (Theses) by Subject "Silicon nanowires (SiNWs)"
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Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2011)This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, ...