Browsing School of Microelectronic Engineering (Theses) by Subject "Integrated Optical Mach-Zehnder Interferometer (IO-MZI)"
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Optimization of line pattern transfer of integrated optical mach-zender interferometer for optical sensor
Conventional photolithography usually used in in-house fabrication process to transfer the design of line pattern. This research lays the foundation for the optimization of photo lithography process for line pattern transfer ...