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    • Fabrication Of 50 µm transistor and AlNiAu interconnection process 

      Shaffie Husin (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)
      Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing ...
    • Optimization on oxidation process using 2K factorial design method 

      Yeap Li Chian (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      Silicon technologies progress in the last twenty years has traced the path to the unprecedented revolution of information technologies, which has changed everybody’s lifestyles. With the help of software, the world of ...