Browsing by Author "Uda Hashim, P.M. Dr. (Advisor)"
Now showing items 1-2 of 2
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Fabrication and characterization of Barium Strontium Titanate (BA1-XSRXTIO3 BST) for heat sensor application
Mohd Hafiz Shaari (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Ferroelectric Barium Strontium Titanate (BST) thin films were successfully prepared by wet chemical deposition or sol-gel method and characterized using SPA, AFM, and sensing properties. The BST thin film was fabricated ... -
Optimization of 950K PMMA resists for Nano-application using Statistical Design Expert
Khoo Chien Chin (Universiti Malaysia PerlisSchool of Manufacturing Engineering, 2008-05)This paper discusses the application of a design of experiments (DOE) experimental method for analyzing the influence of four parameters (coating time, spinning speed, and softbake time and softbake temperature).involved ...