Browsing by Author "Mohd Hafiz, Ismail"

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    • Design and Fabrication of MEMS Heatuator for Automotive Device Applications 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalafande, Che Ismail (Malaysian Invention & Design Society (MINDS), 2006)
      Heatuator is one kind of actuators that converts energy to appropriate actions. The device is typical thermal actuator capable of over 20 micronewtons of force, over 10 um of deflection, at an input electrical power of 25 ...

    • Design and Fabrication of MEMS Micro Switch for Rf Applications 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalafande, Che Ismail (Malaysian Invention & Design Society (MINDS), 2006)
      MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode.

    • Microelectromechanical Systems (MEMS) Heatuator 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalfande, Che Ismail (International Exhibition of Inventions, 2007-04-18)
      Heatuator is a thermal actuator that converts electrical energy to mechanical motions. For an input electrical power of 25 mW (5V, 5mA), this device is capable of over 20uN of force with 10um of deflection. This heatuator ...