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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/8070| Title: | Design and Fabrication of MEMS Micro Switch for Rf Applications |
| Authors: | Zaliman, Sauli, Prof. Madya Hasnizah, Aris Razaidi, Hussin Mohd Hafiz, Ismail Rizalafande, Che Ismail zaliman@unimap.edu.my |
| Keywords: | MEMS Micro Switch Micro Switch Switches UniMAP -- Research ITEX |
| Issue Date: | 2006 |
| Publisher: | Malaysian Invention & Design Society (MINDS) |
| Series/Report no.: | 17th International Invention, Innovation, Industrial Design & Technology Exhibition 2006 (ITEX 2006) |
| Abstract: | MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode. |
| Description: | Prof. Madya Zaliman Sauli and his team from School of Mechatronic Engineering won bronze for Design and Fabrication of MEMS Micro Switch for Rf Applications. ITEX 2006, 19th - 21st May 2006 was held at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur. |
| URI: | http://dspace.unimap.edu.my/123456789/8070 |
| Appears in Collections: | Universiti Malaysia Perlis |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Design And Fabrication Of MEMS Micro Switch For RF Applications.pdf | Access is limited to UniMAP community | 298.85 kB | Adobe PDF | View/Open |
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