Design and Fabrication of MEMS Micro Switch for Rf Applications

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Date
2006
Author
Zaliman, Sauli, Prof. Madya
Hasnizah, Aris
Razaidi, Hussin
Mohd Hafiz, Ismail
Rizalafande, Che Ismail
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Abstract
MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode.
URI
http://dspace.unimap.edu.my/123456789/8070
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