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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/6362| Title: | Techniques in Integrated Circuit (IC) failure analysis |
| Authors: | Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. Sanna, Taking |
| Keywords: | Failure analysis Integrated circuits Microelectronics Reliability (Engineering) |
| Issue Date: | 13-Dec-2004 |
| Publisher: | ELectron Microscopy Society of Malaysia (EMSM) |
| Citation: | p.1-6 |
| Series/Report no.: | 13th Scientific Conference ELectron Microscopy Society of Malaysia (EMSM) |
| Abstract: | Failure analysis (FA) plays an important role in the development and manufacturing of integrated circuits. It provides necessary information for technology advancement and for corrective action to improve quality and reliability. In this paper the commonly used techniques in integrated circuits failure analysis are discussed. The paper also describes the basic FA flow consists of fault localization, deprocessing, defect localisation and inspection characterisation. |
| Description: | Organized by ELectron Microscopy Society of Malaysia (EMSM), 13th - 15th December 2004 at Palm Garden Hotel, Putrajaya. |
| URI: | http://dspace.unimap.edu.my/123456789/6362 |
| Appears in Collections: | Conference Papers Zul Azhar Zahid Jamal, Dato' Prof. Dr. |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Technique in intergrated circuit (IC).pdf | Access is limited to UniMAP community. | 335.4 kB | Adobe PDF | View/Open |
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