Please use this identifier to cite or link to this item:
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/32784
Title: | Designing microchannels separator mask for lithography process |
Authors: | Shahrul Aizzam, Ariffin Uda, Hashim, Prof. Dr. Tijjani Adam, Shuwa shzzam7@yahoo.com uda@unimap.edu.my tijjaniadam@yahoo.com.m |
Keywords: | Chrome mask Microchannel Microfluidic Separator |
Issue Date: | 2013 |
Publisher: | Trans Tech Publications |
Citation: | Advanced Materials Research, vol. 795, 2013, pages 563-567 |
Abstract: | Recently microfluidic has drawn attention from fellow research because of their unique properties and behavior in biotechnology, biomedical, micro and nanotechnology. Microfluidic is a combination from several components that consists from Microhannel, micromixer, microchamber, concentrator, separation and valve but component of microfluidic will be conduct in simulation is microfluidic separation and microchannel. This paper will elaborate more about design of microchannel separator by using COMSOL Multiphysics 3.5 software and base on the result from the COMSOL Multiphysics 3.5, we can create a detail design in the autoCAD software and lastly, as the result for this paper is an actual fabrication mask will be reveal for further fabrication process. |
Description: | Link to publisher's homepage at http://www.ttp.net/ |
URI: | http://www.scientific.net/AMR.795.563 http://dspace.unimap.edu.my:80/dspace/handle/123456789/32784 |
ISBN: | 978-303785811-0 |
ISSN: | 1022-6680 |
Appears in Collections: | Uda Hashim, Prof. Ts. Dr. Institute of Nano Electronic Engineering (INEE) (Articles) |
Files in This Item:
File | Description | Size | Format | |
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Designing microchannels separator mask for lithography process.pdf | 9.07 kB | Adobe PDF | View/Open |
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