Designing microchannels separator mask for lithography process

Abstract

Recently microfluidic has drawn attention from fellow research because of their unique properties and behavior in biotechnology, biomedical, micro and nanotechnology. Microfluidic is a combination from several components that consists from Microhannel, micromixer, microchamber, concentrator, separation and valve but component of microfluidic will be conduct in simulation is microfluidic separation and microchannel. This paper will elaborate more about design of microchannel separator by using COMSOL Multiphysics 3.5 software and base on the result from the COMSOL Multiphysics 3.5, we can create a detail design in the autoCAD software and lastly, as the result for this paper is an actual fabrication mask will be reveal for further fabrication process.