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Issue Date
Title
Author(s)
2007
Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology
Uda, Hashim
;
Ramzan, Mat Ayub
;
Nik Hazura, Nik Hamat
2006
Alignment mark architecture effect on alignment signal behavior in advanced lithography
Normah, Ahmad
;
Uda, Hashim
;
Mohd Jeffrey, Manaf
;
Kader Ibrahim, Abdul Wahab
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Uda, Hashim
1
Kader Ibrahim, Abdul Wahab
1
Mohd Jeffrey, Manaf
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Nik Hazura, Nik Hamat
1
Normah, Ahmad
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Alignment mark
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Alignment signal
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Borophosphosilicate glass
1
CMOS integrated circuits
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Hydrofluoric acid staining
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Date issued
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2007
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2006