UniMAP Library Digital Repository JSPUI
UniMAP Library Digital Repository preserves and enables easy and open access to all types of digital content including text, images, moving images, mpegs and data sets
Learn More
Please use this identifier to cite or link to this item:
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/6889| Title: | Borophosphosilicate glass (BPSG) reflow characterization for submicron CMOS technology |
| Authors: | Uda, Hashim Ramzan, Mat Ayub Nik Hazura, Nik Hamat |
| Keywords: | Borophosphosilicate glass Hydrofluoric acid staining Steam annealing Microelectronics -- Materials Integrated circuits -- Materials Metal oxide semiconductors, Complementary |
| Issue Date: | 2007 |
| Publisher: | Universiti Kebangsaan Malaysia |
| Citation: | Sains Malaysiana, vol.36 (1), 2007, pages 53-57. |
| Abstract: | This paper involves the planarization of borophosphosilicate glass (BPSG) film using a new recipe for annealing process to improve the borophosphosilicate glass (BPSG) film flatness after reflow. This improvement is for 0.35μm technology using steam annealing method at different temperatures. This process allows the planarization of wafers with thin layer at its surface. In this paper we present the comparison between the effect of hydrofluoric acid (HF) staining on the cross sectional topography with the samples without hydrofluoric acid (HF) staining analyzed by field emission scanning electron microscopy (FESEM). We found that staining with HF produced clearer images. |
| Description: | Link to publisher's homepage at http://pkukmweb.ukm.my/~jsm/ |
| URI: | http://pkukmweb.ukm.my/~jsm/ http://dspace.unimap.edu.my/123456789/6889 |
| ISSN: | 0126-6039 |
| Appears in Collections: | School of Microelectronic Engineering (Articles) Uda Hashim, Prof. Ts. Dr. |
Items in UniMAP Library Digital Repository are protected by copyright, with all rights reserved, unless otherwise indicated.