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Issue Date
Title
Author(s)
2007
Effect of alignment mark architecture on alignment signal behavior in advanced lithography
Normah, Ahmad
;
Uda, Hashim
;
Mohd Jeffery, Manaf
;
Kader Ibrahim, Abdul Wahab
2006
Characterization of robust alignment mark to improve alignment performance
Normah, Ahmad
;
Uda, Hashim
;
Mohd Jefrey, Manaf
;
Kader, Ibrahim
2006
Alignment mark architecture effect on alignment signal behavior in advanced lithography
Normah, Ahmad
;
Uda, Hashim
;
Mohd Jeffrey, Manaf
;
Kader Ibrahim, Abdul Wahab
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Author
3
Normah, Ahmad
3
Uda, Hashim
2
Kader Ibrahim, Abdul Wahab
1
Kader, Ibrahim
1
Mohd Jeffery, Manaf
.
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Subject
3
Alignment mark
2
Lithography
1
Alignment
1
Alignment performance
1
CMOS integrated circuits
.
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Date issued
1
2007
2
2006