Micro-reservoir depth determination with Twyman-Green Interferometer

Abstract

A micro-reservoir is fabricated on transparent silica wafer using Reactive Ion Etching (RIE). The depth of the micro-reservoir has been measured using profilometer, Atomic Force Microscopy (AFM) and Twyman Green-Interferometer. Depth of micro-reservoir obtained from Twyman Green-Interferometer is 0.566 um using fringe shifting and intensity measurements while according to the profilometer and AFM surface analysis, the depth of micro-reservoir is 0.651 um and 0.619 um. This implies that the Twyman Green Interferometer can be use to measure depth of micro-reservoir.