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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/1989
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ruhaizi Mohd Hatta | - |
dc.date.accessioned | 2008-09-08T12:04:57Z | - |
dc.date.available | 2008-09-08T12:04:57Z | - |
dc.date.issued | 2008-03 | - |
dc.identifier.uri | http://dspace.unimap.edu.my/123456789/1989 | - |
dc.description | Access is limited to UniMAP community. | en_US |
dc.description.abstract | Single crystal 3C-SiC capacitive pressure sensors are proposed for high-temperature sensing applications. SiC is an attractive material for harsh environment micromachined transducers due to its outstanding electrical, mechanical and chemical properties. The prototype device consists of an edge-clamped circular SiC diaphragm with a radius of 400 μm and a thickness of 0.5 μm suspended over a 2 μm sealed cavity on a silicon substrate. The fabricated sensor demonstrates a high temperature sensing capability up to 400oC, limited by the test setup. At 400oC, the device achieves a linear characteristic response between 1100 Torr and 1760 Torr with a sensitivity of 7.7 fF/Torr, a linearity of 2.1 %, a hysterisis of 3.7 %, and a sensing resolution of 9.1 Torr (12 mbar). | en_US |
dc.language.iso | en | en_US |
dc.publisher | Universiti Malaysia Perlis | en_US |
dc.subject | Capacitive pressure sensor | en_US |
dc.subject | Detectors | en_US |
dc.subject | Crystals | en_US |
dc.subject | High-temperature sensor | en_US |
dc.subject | Microelectromechanical systems | en_US |
dc.subject | Transducers | en_US |
dc.subject | Silicon | en_US |
dc.subject | Silicon carbide | en_US |
dc.title | Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software | en_US |
dc.type | Learning Object | en_US |
dc.contributor.advisor | Hasnizah Aris (Advisor) | en_US |
dc.publisher.department | School of Microelectronic Engineering | en_US |
Appears in Collections: | School of Microelectronic Engineering (FYP) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Abstract, Acknowledgment.pdf | 102.77 kB | Adobe PDF | View/Open | |
Conclusion.pdf | 11.85 kB | Adobe PDF | View/Open | |
Introduction.pdf | 87.55 kB | Adobe PDF | View/Open | |
Literature review.pdf | 62.71 kB | Adobe PDF | View/Open | |
Methodology.pdf | 393.85 kB | Adobe PDF | View/Open | |
References and appendix.pdf | 869.11 kB | Adobe PDF | View/Open | |
Results and discussion.pdf | 465.37 kB | Adobe PDF | View/Open |
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