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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software 121

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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software 0 2 1 1 2 0 0

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Literature review.pdf 6
Abstract, Acknowledgment.pdf 5
Conclusion.pdf 4
Introduction.pdf 2
Methodology.pdf 2
References and appendix.pdf 2
Results and discussion.pdf 2

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