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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software 78

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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software 0 0 2 2 9 4 0

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Literature review.pdf 2
Abstract, Acknowledgment.pdf 1
Conclusion.pdf 1
Introduction.pdf 1
Methodology.pdf 1
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Results and discussion.pdf 1

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