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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/1984
Title: | Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID) |
Authors: | Muhammad Afif Abdul Rahman Shaiful Nizam Mohyar (Advisor) |
Keywords: | Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication |
Issue Date: | Mar-2008 |
Publisher: | Universiti Malaysia Perlis |
Abstract: | Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope or an electron beam writing system locally decomposes gas molecules which are adsorbed on the sample surface. The resulting volatile components are evacuated by the pumping system, while nonvolatile material is cross-linked in a kind of polymerization process, building up the deposit. In this project, the influence of acceleration voltage will be studied as a parameter. The influences of the length, diameter and shape of the deposited structures are also analyzed in this project. |
Description: | Access is limited to UniMAP community. |
URI: | http://dspace.unimap.edu.my/123456789/1984 |
Appears in Collections: | School of Microelectronic Engineering (FYP) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Abstract, Acknowledgment.pdf | 27.47 kB | Adobe PDF | View/Open | |
Conclusion.pdf | 17.19 kB | Adobe PDF | View/Open | |
Introduction.pdf | 20.19 kB | Adobe PDF | View/Open | |
Literature review.pdf | 29.61 kB | Adobe PDF | View/Open | |
Methodology.pdf | 87.46 kB | Adobe PDF | View/Open | |
References and appendix.pdf | 11.5 kB | Adobe PDF | View/Open | |
Results and discussion.pdf | 616.9 kB | Adobe PDF | View/Open |
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