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http://dspace.unimap.edu.my:80/xmlui/handle/123456789/18752| Title: | Finite element analysis of a lateral microelectro-thermal actuator |
| Authors: | Azira, Abd Aziz Abdul Rahman, Mohd. Saad, Prof. Madya Hasnizah, Aris |
| Keywords: | Blade tip Electrical connection Heat flow distribution Operation conditions Potential difference Total current |
| Issue Date: | 28-Sep-2011 |
| Publisher: | Institute of Electrical and Electronics Engineers (IEEE) |
| Citation: | p. 354-358 |
| Series/Report no.: | Proceedings of the IEEE Regional Symposium on Micro and Nanoelectronics (RSM) 2011 |
| Abstract: | This paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator. |
| Description: | Link to publisher's homepage at http://www.ieee.org/ |
| URI: | http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6088359 http://dspace.unimap.edu.my/123456789/18752 |
| ISBN: | 978-1-6128-4846-4 |
| Appears in Collections: | Conference Papers |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Finite element analysis of a lateral microelectro-thermal actuator.pdf | 6.8 kB | Adobe PDF | View/Open |
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