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dc.contributor.authorAzira, Abd Aziz-
dc.contributor.authorAbdul Rahman, Mohd. Saad, Prof. Madya-
dc.contributor.authorHasnizah, Aris-
dc.date.accessioned2012-04-10T09:04:08Z-
dc.date.available2012-04-10T09:04:08Z-
dc.date.issued2011-09-28-
dc.identifier.citationp. 354-358en_US
dc.identifier.isbn978-1-6128-4846-4-
dc.identifier.urihttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6088359-
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/18752-
dc.descriptionLink to publisher's homepage at http://www.ieee.org/en_US
dc.description.abstractThis paper reports on research that designed, and characterized a lateral microelectro-thermal actuator using ANSYS in order to simulate. The aim of this study is mainly to compute and compare the blade tip displacement of the different materials at the same operation conditions when potential difference is applied across the electrical connection pads, resulting the total current and heat flow distributions all over the microelectro-thermal actuator.en_US
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en_US
dc.relation.ispartofseriesProceedings of the IEEE Regional Symposium on Micro and Nanoelectronics (RSM) 2011en_US
dc.subjectBlade tipen_US
dc.subjectElectrical connectionen_US
dc.subjectHeat flow distributionen_US
dc.subjectOperation conditionsen_US
dc.subjectPotential differenceen_US
dc.subjectTotal currenten_US
dc.titleFinite element analysis of a lateral microelectro-thermal actuatoren_US
dc.typeWorking Paperen_US
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