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Browsing by Author Normah, Ahmad
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) |
| 2006 | Alignment mark architecture effect on alignment signal behavior in advanced lithography | Normah, Ahmad; Uda, Hashim; Mohd Jeffrey, Manaf; Kader Ibrahim, Abdul Wahab |
| 2006 | Characterization of robust alignment mark to improve alignment performance | Normah, Ahmad; Uda, Hashim; Mohd Jefrey, Manaf; Kader, Ibrahim |
| 2007 | Effect of alignment mark architecture on alignment signal behavior in advanced lithography | Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab |
| 2008 | Effect of alignment mark depth on alignment signal behavior in advanced lithography | Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab; uda@kukum.edu.my; normah_ahmad@silterra.com |
