| dc.contributor.author | Uda, Hashim, Prof. Dr. | |
| dc.contributor.author | Muhamad Emi Azri, Shohini | |
| dc.date.accessioned | 2010-07-06T02:15:53Z | |
| dc.date.available | 2010-07-06T02:15:53Z | |
| dc.date.issued | 2010-03-11 | |
| dc.identifier.citation | AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509 | en_US |
| dc.identifier.isbn | 978-073540760-2 | |
| dc.identifier.issn | 0094-243X | |
| dc.identifier.uri | http://link.aip.org/link/?APCPCS/1217/505/1 | |
| dc.identifier.uri | http://dspace.unimap.edu.my/123456789/8205 | |
| dc.description | International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia.
Link to publisher's homepage at http://proceedings.aip.org/ | en_US |
| dc.description.abstract | A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | American Institute of Physics | en_US |
| dc.relation.ispartofseries | Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007 | en_US |
| dc.subject | DNA hybridization | en_US |
| dc.subject | Lab-on-a-chip | en_US |
| dc.subject | Nanogap | en_US |
| dc.subject | Reverse spacer lithographic | en_US |
| dc.subject | Spacer patterning technology | en_US |
| dc.subject | International Conference on Advancement of Materials and Nanotechnology 2007 | en_US |
| dc.subject | ICAMN 2007 | en_US |
| dc.title | Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography | en_US |
| dc.type | Working Paper | en_US |
