Browsing Zaliman Sauli, Lt. Kol. Professor Dr. by Subject "Design of experiment (DOE)"
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Interaction relationship analysis of surface roughness on aluminium etched wafer using RIE
(Trans Tech Publications, 2014)This paper presents the interaction relationships between Tetrafluoromethane (CF₄) gas, Oxygen (O₂) gas, and RF power in response to the surface roughness of an Aluminium deposited wafer after being etched using Reactive ... -
Main effects study on plasma etched aluminium metallization
(Trans Tech Publications, 2014-01)Main effects contributing to the quality of surface roughness on an etched aluminium metallization wafer using Reactive Ion Etching (RIE) was studied. A total of three controllable process variables, with eight sets of ...