Browsing Zaliman Sauli, Lt. Kol. Professor Dr. by Author "R., Hatta"

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    • Microfluidic channel depth determination with Tywman-Green interferometer 

      Wan Mokhdzani, Wan Nor Haimi; Zaliman, Sauli, Prof. Madya Dr.; Retnasamy, Vithyacharan; Taniselass, S.; N., Ramli; M. H. A. Aziz; R., Hatta (Springer-Verlag London., 2013-07)
      A microfluidic channel is fabricated on a silica wafer using reactive ion etching (RIE). The depth of the microfluidic channel has been measured using a surface profilometer and a Twyman-Green interferometer (TGI) setup. ...