Carbon nanotubes : Design and fabrication for biosensor applications
Mohammad Nuzaihan, Md Nor
Mohd Asyraf, Mohd Zulkifli
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Carbon nanotubes or known as CNTs are allotropes of carbon with a cylindrical nanostructure. They exhibit extraordinary strength and unique electrical properties, and are efficient thermal conductors . In particular, it is useful in genetic profiling of human diseases, which includes in identifying genes that are expressed in certain diseases such as cancer . This research will based on design and fabricate CNTs biosensor using carbon nanotube and integrate carbon nanotube onto wafer using combination of dielectrophosis and nanomanipulation. Carbon nanotube CNTs biosensor mask are design using AUTOCAD software; there is four mask involved, first mask is Gate Formation, second mask is insulation layer third mask is source and drain and final mask forth mask is used as test channel. This process will involve conventional photolithography process, electron beam evaporator, thermal oxidation and wet etching process. To inspect and characterize carbon nanotube electrical properties it will involve tools such as SEM, AFM, Dielectric Analyzer, IV-CV and Semiconductor Parametric Analyzer system.