Design and analysis of MEMS based micropumps for medical application

Abstract

Micropumps are small pumps that have high accuracy with functional dimensions in micrometer range size. They have miniaturized overall size, potential cost and improved dosing accuracy for medical application especially for drug delivery systems. Basic components of micropump are pumping chamber, actuator mechanism, diaphragm, inlet valve and outlet valve. The work presented in this paper showing the studies of micropump with design and simulation. The micropump has been designed with a piezoelectric actuator for the medical application. Three important parts of micropump which are diaphragm, valve and actuator will be designed in this paper by using MEMS-Pro (Layout Edition) software approaches. Dimension and size of the micropump are determined in this paper. Besides that, by using software such as SAMCEF and Oofelie are used to investigate the behavior of micropump. In addition, the pressure analyses of micropump are analyzed for the low and high pressure that will be applied to the micropump design.