Browsing Centre of Excellence for Advanced Sensor Technology (CEASTech) (Articles) by Subject "Langmuir probe"

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    • Effect of substrate bias in copper sputtering plasma measured by Langmuir Probe 

      Jia Wei, Low; Nafarizal, Nayan; Mohd Zainizan, Sahdan; Mahamad, Abd Kadir; Mohd Khairul, Ahmad; Ali Yeon, Md Shakaff; Ammar, Zakaria; Fathinul Syahir, Ahmad Saad; Ahmad Faizal, Mohd Zain (Trans Tech Publications Inc., 2014-04)
      There are several techniques to deposit the metal oxide thin film such as electron beam evaporator, pulse laser deposition and reactive magnetron sputtering deposition. In this experiment, magnetron sputtering deposition ...