Browsing Centre of Excellence for Advanced Sensor Technology (CEASTech) (Articles) by Author "akhairul@uthm.edu.my"

Now showing items 1-2 of 2

    • Effect of substrate bias in copper sputtering plasma measured by Langmuir Probe 

      Jia Wei, Low; Nafarizal, Nayan; Mohd Zainizan, Sahdan; Mahamad, Abd Kadir; Mohd Khairul, Ahmad; Ali Yeon, Md Shakaff; Ammar, Zakaria; Fathinul Syahir, Ahmad Saad; Ahmad Faizal, Mohd Zain (Trans Tech Publications Inc., 2014-04)
      There are several techniques to deposit the metal oxide thin film such as electron beam evaporator, pulse laser deposition and reactive magnetron sputtering deposition. In this experiment, magnetron sputtering deposition ...

    • Influence of dissipation power in copper sputtering plasma measured by optical emission spectroscopy 

      Kevin, Low; Nafarizal, Nayan, Prof. Madya Dr.; Mohd Zainizan, Sahdan, Dr.; Abd Kadir, Mahamad, Dr.; Mohd Khairul, Ahmad, Dr.; Ali Yeon, Md Shakaff, Prof. Dr.; Ammar, Zakaria; Fathinul Syahir, Ahmad Sa'ad; Ahmad Faizal, Mohd Zain (Trans Tech Publications, 2014)
      Copper oxide is a low cost material, easy process fabrication and sensitivity to ambient conditions. Therefore, it is a suitable p-type semiconductor oxides material to be used as a gas sensing material. In order to raise ...