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Low cost fabrication of micromixer and microchamber for microfluidic lab-on-chip
(Institute of Electrical and Electronic Engineers (IEEE), 2012)
Microfluidic technology has been given the contribution in biomedical and chemistry. The testing and diagnosis on bio-reagents has the efficiency increased through the implementation of microfluidic technology, such as lab ...
Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire
(Institute of Electrical and Electronics Engineers (IEEE), 2012)
In fabrication of Nanowire alignment and exposure are the most critical steps in photolithography process, the resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original ...