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Formation of Si nanostructure using size reduction technique
(Universiti Malaysia Perlis (UniMAP), 2010-10-16)
A simple method for the fabrication of nanogaps using conventional photolithography combined with pattern-size reduction techniques is presented. Silicon material is used to fabricate the nanogap structure and gold is used ...
Fabrication and characterization of a-Si micro and nano-gap structure for electrochemical sensor
(American Institute of Physics, 2010-12-01)
The development and application of micro gap for electrochemical sensors and biomolecule detection are reviewed in this article. The preparation methods for micro- and nano-gaps and their properties are discussed along ...