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    • Study of the cycle time behavior for product scaling 0.16um and smaller in foundry 

      Mohd Azizi, Chik; Uda, Hashim, Prof. Dr. (Universiti Malaysia Perlis (UniMAP)Centre for Graduate Studies, 2010-10-16)
      This research is to study the cycle time behavior for 0.16um and smaller geometry for wafer product once its started in wafer manufacturing facility. The overall configuration of the process, product, manufacturing and ...