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    Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication 

    Sutikno, Madnasri; Uda, Hashim; Zul Azhar, Zahid Jamal (Springer New York, 2007-12)
    We present an optimization of nano dot of negative tone e-beam resist which is a very important step in single electron transistor fabrication process. The optimum design of dot and nano constriction plays a significant ...

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    AuthorSutikno, Madnasri (1)Uda, Hashim (1)Zul Azhar, Zahid Jamal (1)Subjecte-beam (1)Electron beams (1)Integrated circuits (1)Integrated circuits -- Design and construction (1)Lithography (1)... View MoreDate Issued2007 (1)

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