Browsing Zul Azhar Zahid Jamal, Dato' Prof. Dr. by Subject "E-beam lithography (EBL)"
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Mask Making Process (Positive and Negative Mask)
(Kementerian Pengajian Tinggi Malaysia (KPTM), 2007-08-10)Generally, two types of masks are used in MOSFET fabrication; positive mask and negative mask. These resists mask can be used either in lift off process or conventional lithography step depends on the fabrication process ...